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Tanner MEMS Design

A central part of the design flow is Tanner L-Edit MEMS, an advanced layout editor with MEMS-friendly capabilities such as curved polygons and all-angle Boolean operations. In contrast to other CAD tools designed for mechanical engineering, L-Edit MEMS shows clear and dark fields of the masks. As a result, you can quickly draw and edit masks, and then easily view different combinations of masks to examine their overlaps and interactions. Using powerful features such as excellent curve support, interactive DRC, Boolean operations, object snapping, and alignment, you can work more efficiently to save time and money. L-Edit MEMS gives greater precision by performing complex Boolean and derived layer operations with polygons of arbitrary shape and curvature.

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Features and Benefits:

  • A complete 3D MEMS and IC design solution in one unified environment
  • 25 years’ experience with MEMS tools
  • Create a MEMS 3D model from layout
  • Highly programmable layout editor with MEMS-friendly capabilities, such as curved polygons
  • Parameterized layout generators help create complex MEMS structures
  • Complete layer and design geometry visualization• Easily create, place and align MEMS structures with the alignment toolbar or the L Comp composition library